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Silicon Photonics Technology

Get Access to AMO's Silicon Photonics Technology

 

 

Get Access

Consult AMO for the implementation of your nanophotonic design.

   Request

    

Send us a request. Together we will fix protection of your IP, feasibility of your idea, rough cost estimation and design rules.

   

    Design  

Please provide us your design in GDS. AMO will check design rules and calculate cost and effort.

   

 Fabrication 

After your order AMO will fabricate your devices and will return the samples quickly after inspection.

    

 Evaluation



 

 

  

 

Available Modules

AMOs Technology is optimized for 220 nm/3000 nm and 340 nm/2000 nm (SOI/BOX) SOI wafers. Other substrate types are possible on request.

Waveguides

Processes for strip, rib, slotted and combined technology waveguides

Passive Devices

Processes for ring resonators, splitters, couplers, photonic crystals etc.

Active Devices

Processes for n+ and p+ doping and metal interconnects

Heater Technology

Processes for integrated microheaters

Couplers

Processes for grating couplers and mode size converters

Peripheric structures

Processes for patterned top cladding, membrane etching, metal integration etc available

 

 

Features

AMO offers a versatile and flexible technology platform for research, development and small-scale production of silicon nanophotonic devices and circuits.

Individual service

  for high flexibility and short 
  turnaround

Ultra-high accuracy 

  High resolution E-beam lithography for ultrasmall
  features below 50 nm with proximity correction,
  automated CD-SEM for accuracy check

Flexible 

- Substrate size from 2x2 cm up to 6
- From single chip to wafer batch processing
- Integration of special processes and materials
- Mix & Match with photolithography possible

Short turnaround  

  Processing run is 2..8 weeks depending on
  complexity

IP protection guaranteed 

  Independent research SME allows  
  flexible IP-protection schemes adapted to
  customers' needs

Modes of cooperation

- Direct (from single chip to long-term 
  contracts)
- Subcontractor
- Project partner

 

 

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